| 1. Identificação | |
| Tipo de Referência | Artigo em Revista Científica (Journal Article) |
| Site | mtc-m16.sid.inpe.br |
| Código do Detentor | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identificador | 6qtX3pFwXQZsFDuKxG/CADrv |
| Repositório | sid.inpe.br/marciana/2004/06.28.10.10 |
| Última Atualização | 2013:05.14.17.30.34 (UTC) marciana |
| Repositório de Metadados | sid.inpe.br/marciana/2004/06.28.10.10.24 |
| Última Atualização dos Metadados | 2018:06.05.01.20.55 (UTC) administrator |
| Chave Secundária | INPE-10767-PRE/6225 |
| DOI | 10.1063/1.1431431 |
| ISBN/ISSN | 0021-8979 |
| ISSN | 0021-8979 |
| Chave de Citação | FerreiraAbrLeiCorTra:2002:AnReSt |
| Título | Analysis of residual stress in diamond films by x-ray diffraction and micro-Raman spectroscopy  |
| Ano | 2002 |
| Mês | Feb. |
| Data de Acesso | 18 maio 2024 |
| Tipo Secundário | PRE PI |
| Número de Arquivos | 1 |
| Tamanho | 607 KiB |
| 2. Contextualização | |
| Autor | 1 Ferreira, Neidenei Gomes 2 Abramof, Eduardo 3 Leite, Nelia Ferreira 4 Corat, Evaldo Jose 5 Trava-Airoldi, Vladimir Jesus |
| Grupo | 1 LAS-INPE-MCT-BR 2 3 4 LAS-INPE-MCT-BR 5 LAS-INPE-MCT-BR |
| Afiliação | 1 Instituto Nacional de Pesquisas Espaciais (INPE) 2 Instituto Nacional de Pesquisas Espaciais (INPE) 3 Instituto Nacional de Pesquisas Espaciais (INPE) 4 Instituto Nacional de Pesquisas Espaciais (INPE) 5 Instituto Nacional de Pesquisas Espaciais (INPE) |
| Endereço de e-Mail do Autor | 1 neidenei@las.inpe.br 2 eduardo.abramof@inpe.br 3 nelia.leite@inpe.br 4 corat@las.inpe.br 5 vladimir@las.inpe.br |
| Revista | Journal of Applied Physics |
| Volume | 91 |
| Número | 4 |
| Páginas | 2466 |
| Histórico (UTC) | 2006-09-28 22:25:57 :: administrator -> sergio :: 2008-01-07 12:53:22 :: sergio -> administrator :: 2013-03-31 13:35:11 :: administrator -> marciana :: 2002 2013-05-14 17:30:35 :: marciana -> administrator :: 2002 2018-06-05 01:20:55 :: administrator -> marciana :: 2002 |
| 3. Conteúdo e estrutura | |
| É a matriz ou uma cópia? | é a matriz |
| Estágio do Conteúdo | concluido |
| Transferível | 1 |
| Tipo do Conteúdo | External Contribution |
| Tipo de Versão | publisher |
| Palavras-Chave | chemical-vapor-deposition thin-films crystalline quality intrinsic stress cvd strain plasma |
| Resumo | We investigate the residual stress in diamond films grown on ~001! silicon substrates as a function of film thickness. The diamond films were deposited at 1070 K by the conventional hot filament technique using a gas mixture of methane ~1.0% vol! and hydrogen ~99.0% vol!. The film thickness, obtained from cross section scanning electron micrographs, varied from 3.0 to 42 mm as the growth time increased from 1 to 10 h. These images evidenced that the columnar growth is already established for films thicker than 10 mm. Top view micrographs revealed predominantly faceted pyramidal grains for the films at all growth stages. The grain size, obtained from these images, was found to vary linearly with film thickness. Using a high resolution x-ray diffractometer, the residual stress was determined by measuring, for each sample, the ~331! diamond Bragg diffraction peak for C values ranging from 260° to 160°, and applying the sin2 c method. For the micro-Raman spectroscopy, we used the summation method, which consists in recording and adding a large number of spectra in different places of a selected area of the sample. All Raman spectra were fitted with Lorentzian lines to separate the contribution of the pure diamond and the other nondiamond graphite! phases. This spectral analysis performed in each sample allowed the determination of the residual stress, from the diamond Raman peak shifts, and also the diamond purity, which increases from 70% to 90% as the thickness goes from 3 to 42 mm. The type and magnitude of the residual stress obtained from x-ray and micro-Raman measurements agreed well for films thicker than 10 mm. For films thinner than this value, an opposite behavior between both results was observed. We attributed this discrepancy to the domain size characteristic of each technique. |
| Área | FISMAT |
| Arranjo | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Analysis of residual... |
| Conteúdo da Pasta doc | acessar |
| Conteúdo da Pasta source | não têm arquivos |
| Conteúdo da Pasta agreement | não têm arquivos |
| 4. Condições de acesso e uso | |
| URL dos dados | http://urlib.net/ibi/6qtX3pFwXQZsFDuKxG/CADrv |
| URL dos dados zipados | http://urlib.net/zip/6qtX3pFwXQZsFDuKxG/CADrv |
| Idioma | en |
| Arquivo Alvo | JApplPhys_91_2466.pdf |
| Grupo de Usuários | administrator marciana |
| Grupo de Leitores | administrator marciana |
| Visibilidade | shown |
| Detentor da Cópia | SID/SCD |
| Política de Arquivamento | allowpublisher allowfinaldraft |
| Permissão de Atualização | não transferida |
| 5. Fontes relacionadas | |
| Unidades Imediatamente Superiores | 8JMKD3MGPCW/3ESR3H2 |
| URL (dados não confiáveis) | http://dx.doi.org/10.1063/1.1431431 |
| Divulgação | WEBSCI; PORTALCAPES; COMPENDEX. |
| Acervo Hospedeiro | sid.inpe.br/banon/2003/08.15.17.40 |
| 6. Notas | |
| Campos Vazios | alternatejournal archivist callnumber copyright creatorhistory descriptionlevel e-mailaddress format isbn label lineage mark mirrorrepository nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readpermission resumeid rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork |
| 7. Controle da descrição | |
| e-Mail (login) | marciana |
| atualizar | |